Design of a Monitoring System for Controlling the Wet Station Equipment 


Vol. 6,  No. 5, pp. 1385-1392, May  1999
10.3745/KIPSTE.1999.6.5.1385


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  Abstract

This paper describes the design of the monitoring system for monitoring the current status and indirect controlling of the Wet Station Equipment which is used for cleaning the wafer. Most of the conventional monitoring system depend on the special hardware and software. Basic design goal of monitoring system is to provide the convenience for the user and the portability for the system. In order for the system to fulfil its requirements, it was designed using GUI(Graphical User Interface) facility based on the Windows NT environment of IBM PC compatible and EtherNet board based on the TCP/IP protocol.

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[IEEE Style]

R. S. Rak, H. K. Rok, C. Y. Yub, "Design of a Monitoring System for Controlling the Wet Station Equipment," The Transactions of the Korea Information Processing Society (1994 ~ 2000), vol. 6, no. 5, pp. 1385-1392, 1999. DOI: 10.3745/KIPSTE.1999.6.5.1385.

[ACM Style]

Rim Seong Rak, Han Kwang Rok, and Choi Yong Yub. 1999. Design of a Monitoring System for Controlling the Wet Station Equipment. The Transactions of the Korea Information Processing Society (1994 ~ 2000), 6, 5, (1999), 1385-1392. DOI: 10.3745/KIPSTE.1999.6.5.1385.

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