An Intelligent Monitoring System of Semiconductor Processing Equipment using Multiple Time-Series Pattern Recognition
Vol. 11, No. 3, pp. 709-716, Jun. 2004
10.3745/KIPSTD.2004.11.3.709
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[IEEE Style]
J. J. Lee, O. B. Kwon, G. Y. Kim, "An Intelligent Monitoring System of Semiconductor Processing Equipment using Multiple Time-Series Pattern Recognition," The KIPS Transactions:PartD, vol. 11, no. 3, pp. 709-716, 2004. DOI: 10.3745/KIPSTD.2004.11.3.709.
[ACM Style]
Joong Jae Lee, O Bum Kwon, and Gye Young Kim. 2004. An Intelligent Monitoring System of Semiconductor Processing Equipment using Multiple Time-Series Pattern Recognition. The KIPS Transactions:PartD, 11, 3, (2004), 709-716. DOI: 10.3745/KIPSTD.2004.11.3.709.