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An Intelligent Monitoring System of Semiconductor Processing Equipment using Multiple Time-Series Pattern Recognition
Joong Jae Lee O Bum Kwon Gye Young Kim
Vol. 11, No. 3, pp. 709-716, Jun. 2004
10.3745/KIPSTD.2004.11.3.709
Vol. 11, No. 3, pp. 709-716, Jun. 2004
10.3745/KIPSTD.2004.11.3.709